Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/190743
Kind Code:
A1
Abstract:
Provided is an elastic wave device in which variations in thickness of a piezoelectric layer can be suppressed. This elastic wave device 10 is provided with a support member 13 having a support substrate, a piezoelectric layer 14 provided on the support member 13, and an excitation electrode provided on the piezoelectric layer 14. A void part 13c is provided to the support member 13. As seen in a plan view, at least part of the excitation electrode and the void part 13c overlap with each other. A portion in the piezoelectric layer 14 that overlaps with the void part 13c in a plan view is a membrane part 15. The membrane part 15 has a first direction w1 and a second direction w2 that is orthogonal to the first direction w1. The membrane part 15 has a central part 15c positioned in the center in the first direction w1, a first portion 15a and a second portion 15b facing each other with the central part 15c interposed therebetween, and an outer peripheral edge. At least part of the outer peripheral edge at the first portion 15a and the second portion 15b of the membrane part 15 is positioned farther toward the outside in the second direction w2 than the outer peripheral edge at the central part 15c.
Inventors:
KIMURA TETSUYA (JP)
KUBO SHINTARO (JP)
KUBO SHINTARO (JP)
Application Number:
PCT/JP2022/004903
Publication Date:
September 15, 2022
Filing Date:
February 08, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2016052129A1 | 2016-04-07 | |||
| WO2012073871A1 | 2012-06-07 |
Foreign References:
| JP2009077159A | 2009-04-09 | |||
| JP2013528996A | 2013-07-11 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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