Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/210293
Kind Code:
A1
Abstract:
An elastic wave device comprising: a piezoelectric layer having a first main surface and a second main surface opposite the first main surface; a functional electrode formed on the piezoelectric layer; and a support member provided on the second main surface of the piezoelectric layer and having a support substrate. The support member has a hollow portion in a position overlapping at least a part of the functional electrode in a plan view taken in a direction in which the support member and the piezoelectric layer are stacked. The piezoelectric layer has formed therein a through hole communicating with the hollow portion. A reinforcing-lid portion closing the through hole is provided on the first main surface of the piezoelectric layer.
Inventors:
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2022/014110
Publication Date:
October 06, 2022
Filing Date:
March 24, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2016103925A1 | 2016-06-30 | |||
| WO2020209152A1 | 2020-10-15 | |||
| WO2012073871A1 | 2012-06-07 | |||
| WO2016147687A1 | 2016-09-22 |
Foreign References:
| JP2014013991A | 2014-01-23 | |||
| JP2011147098A | 2011-07-28 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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