Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/140272
Kind Code:
A1
Abstract:
In the present invention, an elastic wave device comprises a support substrate, a piezoelectric layer provided on the support substrate, a functional electrode provided on the piezoelectric layer, a cavity part, and at least one protrusion. The cavity part is provided in the interior of the support substrate, and positioned overlapping a portion of the functional electrode in plan view as viewed along the direction in which the support substrate and the piezoelectric layer have been layered The at least one protrusion extends in the direction intersecting the layering direction from a part constituting the inner surface of the cavity part of the support substrate, and supports the piezoelectric layer in the layering direction.
Inventors:
INOUE KAZUNORI (JP)
MIMURA MASAKAZU (JP)
IYAMA AKIHIRO (JP)
WATANABE MUNEHISA (JP)
YONEDA TOSHIMARO (JP)
MIMURA MASAKAZU (JP)
IYAMA AKIHIRO (JP)
WATANABE MUNEHISA (JP)
YONEDA TOSHIMARO (JP)
Application Number:
PCT/JP2023/001277
Publication Date:
July 27, 2023
Filing Date:
January 18, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2021060513A1 | 2021-04-01 | |||
| WO2022102719A1 | 2022-05-19 |
Foreign References:
| JP6984800B1 | 2021-12-22 | |||
| JP2014013991A | 2014-01-23 | |||
| JP2009124640A | 2009-06-04 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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