Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/140331
Kind Code:
A1
Abstract:
The present invention suppresses cracking in a piezoelectric layer. This elastic wave device comprises: a support member including a support substrate having a thickness in a first direction; a piezoelectric layer provided in the first direction of the support member; a plurality of first electrode fingers provided in the first direction of the piezoelectric layer and extending in a second direction orthogonal to the first direction; and a plurality of second electrode fingers opposing any of the plurality of first electrode fingers with respect to a third direction orthogonal to the first direction and the second direction, and extending in the second direction. The piezoelectric layer has a through-hole penetrating through the piezoelectric layer in the first direction. The support member has a space portion. The plurality of electrode fingers, when viewed in plan in the first direction, are provided so as to at least partly overlap the space portion. The through-hole, when viewed in plan in the first direction, is provided so as to at least partly overlap the space portion. At least one of the plurality of electrode fingers is provided in the second direction of the through-hole. The plurality of electrode fingers are not provided in the third direction of the through-hole.
Inventors:
YAMANE TAKASHI (JP)
INOUE KAZUNORI (JP)
INOUE KAZUNORI (JP)
Application Number:
PCT/JP2023/001561
Publication Date:
July 27, 2023
Filing Date:
January 19, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| WO2016098526A1 | 2016-06-23 | |||
| WO2021187537A1 | 2021-09-23 |
Foreign References:
| JP2012257019A | 2012-12-27 | |||
| JP2014013991A | 2014-01-23 | |||
| JP2016086308A | 2016-05-19 | |||
| US20210167756A1 | 2021-06-03 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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