Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/219167
Kind Code:
A1
Abstract:
The objective of the present invention is to suppress a deterioration in frequency characteristics. This elastic wave device includes an input terminal, an output terminal, a plurality of resonators, a serial arm electrically connecting between the input terminal and the output terminal, and a parallel arm electrically connecting between the serial arm and the ground potential. The plurality of resonators are each provided with: an IDT electrode having a support member which comprises a support substrate having a thickness in a first direction, a piezoelectric layer which is provided on the support member in the first direction, a first busbar and a second busbar, a first electrode finger, and a second electrode finger; and a protection film provided on the piezoelectric layer in the first direction so as to cover the IDT electrode. The plurality of resonators includes serial arm resonators provided to the serial arm and parallel arm resonators provided to the parallel arm. The thickness, in a plan view along the first direction, of the protection film provided at positions overlapping electrode fingers of the serial arm resonators is greater than the thickness, in a plan view along the first direction, of the protection film provided at positions overlapping electrode fingers of the parallel arm resonators. The thickness of the electrode fingers of the serial arm resonators is different from the thickness of the electrode fingers of the parallel arm resonators.
Inventors:
SUZUKI HIROYA (JP)
YAMAJI TORU (JP)
YAMAZAKI SUNAO (JP)
YAMAJI TORU (JP)
YAMAZAKI SUNAO (JP)
Application Number:
PCT/JP2023/017964
Publication Date:
November 16, 2023
Filing Date:
May 12, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/64; H03H9/145
Domestic Patent References:
| WO2019003855A1 | 2019-01-03 | |||
| WO2021060513A1 | 2021-04-01 |
Foreign References:
| JPH06152299A | 1994-05-31 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF: