Title:
ELASTIC WAVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2018/151147
Kind Code:
A1
Abstract:
This elastic wave element is provided with: an IDT electrode that excites an elastic surface wave and that is provided with a plurality of electrode fingers; a first substrate that is made of piezoelectric crystal, that has a thickness less than an elastic surface wave wavelength λ defined as being two-fold of a repeating interval of the electrode fingers, and that has the IDT electrode positioned on the upper surface; and a second substrate that is joined to the lower surface of the first substrate, that is made of a Si monocrystal the planar orientation thereof being the (100) plane or the (110) plane and planes equivalent thereto, and in which the crystal axis of the Si monocrystal parallel to a substrate surface is inclined at an angle of 25°-65°, 115°-155°, 205°-254°, or 295°-345° with respect to the elastic wave propagation direction when seen from the upper surface of the first substrate being stacked.
Inventors:
KISHINO TETSUYA (JP)
ITO MOTOKI (JP)
ITO MOTOKI (JP)
Application Number:
PCT/JP2018/005063
Publication Date:
August 23, 2018
Filing Date:
February 14, 2018
Export Citation:
Assignee:
KYOCERA CORP (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2016047255A1 | 2016-03-31 |
Foreign References:
| JP2017034363A | 2017-02-09 | |||
| JP2008245222A | 2008-10-09 |
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