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Title:
ELECTRET ELEMENT, PRODUCTION METHOD THEREFOR, SENSOR, ELECTRONIC CIRCUIT, AND INPUT DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/052525
Kind Code:
A1
Abstract:
Provided are: an element suitable for a highly accurate/highly sensitive pressure-detection sensor or switch; a production method therefor; and a sensor, an electronic circuit, and an input device which are provided with said element. This electret element is provided with: a semiconductor which is sandwiched between a pair of electrodes; and an electret member provided in a position relative to the semiconductor such that a gap is provided therebetween. In the electret element, the semiconductor and the electret member may come in contact with each other, and a micro-sized space may be provided. The electret member is semi-permanently maintained in a positively or negatively charged state. A structure is employed which enables the electret member to approach or come into contact with the semiconductor, and thus the amount of current flowing between the pair of electrodes can be controlled.

Inventors:
KOZASA Takehito (Tsukuba Central 5 1-1, Higashi 1-chome, Tsukuba-sh, Ibaraki 65, 〒3058565, JP)
YOSHIDA Manabu (Tsukuba Central 5 1-1, Higashi 1-chome, Tsukuba-sh, Ibaraki 65, 〒3058565, JP)
Application Number:
JP2015/077558
Publication Date:
April 07, 2016
Filing Date:
September 29, 2015
Export Citation:
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Assignee:
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY (3-1 Kasumigaseki 1-chome, Chiyoda-ku Tokyo, 21, 〒1008921, JP)
International Classes:
G01L1/20; G06F3/041; H01G7/02; H03K17/955; H03K17/975
Domestic Patent References:
WO2013168922A12013-11-14
Foreign References:
US3978508A1976-08-31
JPS5124884A1976-02-28
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