Title:
ELECTRIC FIELD EMISSION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2011/059103
Kind Code:
A1
Abstract:
Provided is an electric field emission element, wherein the causes of spherical aberration in relation to an emitted electron beam orbit are fundamentally eliminated or alleviated. An aberration suppression electrode (31) is disposed at a lower position, in terms of height, than an extraction gate electrode (13) such that the inner peripheral edge (31e) of the opening of the aberration suppression electrode (31) is disposed close to an emitter tip (11tp). The position of the inner peripheral edge (31e) of the opening of the aberration suppression electrode (31) is lower, in terms of height, than the position of the emitter tip (11tp). An aberration suppression voltage (Vs) which is a voltage lower than the electric potential of the emitter (11), and which controls the equipotential line near the emitter tip (11tp) in a manner such that the equipotential line becomes parallel, is applied to the aberration suppression electrode (31).
Inventors:
NAGAO Masayoshi (Tsukuba Central 2 1-1, Umezono 1-chom, Tsukuba-shi Ibaraki, 〒3058568, JP)
長尾 昌善 (〒68 茨城県つくば市梅園１−１−１ 中央第２ 独立行政法人産業技術総合研究所内 Ibaraki, 〒3058568, JP)
YOSHIDA Tomoya (Tsukuba Central 2 1-1, Umezono 1-chom, Tsukuba-shi Ibaraki, 〒3058568, JP)
長尾 昌善 (〒68 茨城県つくば市梅園１−１−１ 中央第２ 独立行政法人産業技術総合研究所内 Ibaraki, 〒3058568, JP)
YOSHIDA Tomoya (Tsukuba Central 2 1-1, Umezono 1-chom, Tsukuba-shi Ibaraki, 〒3058568, JP)
Application Number:
JP2010/070416
Publication Date:
May 19, 2011
Filing Date:
November 10, 2010
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology (3-1 Kasumigaseki 1-chome, Chiyoda-ku, Tokyo, 〒1008921, JP)
独立行政法人産業技術総合研究所 (〒21 東京都千代田区霞が関１丁目３番１号 Tokyo, 〒1008921, JP)
NATIONAL UNIVERSITY CORPORATION SIZUOKA UNIVERSITY (836 Ohya, Suruga-ku Shizuoka-shi, Shizuoka, 〒4228529, JP)
国立大学法人静岡大学 (〒29 静岡県静岡市駿河区大谷８３６ Shizuoka, 〒4228529, JP)
NAGAO Masayoshi (Tsukuba Central 2 1-1, Umezono 1-chom, Tsukuba-shi Ibaraki, 〒3058568, JP)
独立行政法人産業技術総合研究所 (〒21 東京都千代田区霞が関１丁目３番１号 Tokyo, 〒1008921, JP)
NATIONAL UNIVERSITY CORPORATION SIZUOKA UNIVERSITY (836 Ohya, Suruga-ku Shizuoka-shi, Shizuoka, 〒4228529, JP)
国立大学法人静岡大学 (〒29 静岡県静岡市駿河区大谷８３６ Shizuoka, 〒4228529, JP)
NAGAO Masayoshi (Tsukuba Central 2 1-1, Umezono 1-chom, Tsukuba-shi Ibaraki, 〒3058568, JP)
International Classes:
H01J1/304
Attorney, Agent or Firm:
FUKUDA Kenzo et al. (Kashiwaya Bldg, 6-13 Nishishinbashi 1-chome, Minato-ku Tokyo, 〒1050003, JP)
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