ELECTRIC FIELD EMISSION ELEMENT - NAT INST OF ADVANCED IND SCIEN

Title:

ELECTRIC FIELD EMISSION ELEMENT

Document Type and Number:

WIPO Patent Application WO/2011/059103

Kind Code:

A1

Abstract:

Provided is an electric field emission element, wherein the causes of spherical aberration in relation to an emitted electron beam orbit are fundamentally eliminated or alleviated. An aberration suppression electrode (31) is disposed at a lower position, in terms of height, than an extraction gate electrode (13) such that the inner peripheral edge (31e) of the opening of the aberration suppression electrode (31) is disposed close to an emitter tip (11tp). The position of the inner peripheral edge (31e) of the opening of the aberration suppression electrode (31) is lower, in terms of height, than the position of the emitter tip (11tp). An aberration suppression voltage (Vs) which is a voltage lower than the electric potential of the emitter (11), and which controls the equipotential line near the emitter tip (11tp) in a manner such that the equipotential line becomes parallel, is applied to the aberration suppression electrode (31).

Inventors:

NAGAO MASAYOSHI (JP)
YOSHIDA TOMOYA (JP)
NEO YOICHIRO (JP)

Application Number:

PCT/JP2010/070416

Publication Date:

May 19, 2011

Filing Date:

November 10, 2010

Export Citation:

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Assignee:

NAT INST OF ADVANCED IND SCIEN (JP)
NAT UNIVERSITY CORP (JP)
NAGAO MASAYOSHI (JP)
YOSHIDA TOMOYA (JP)
NEO YOICHIRO (JP)

International Classes:

H01J1/304

Foreign References:

JPH06275189A	1994-09-30
JPH087772A	1996-01-12
JPH10149778A	1998-06-02
JP2000268706A	2000-09-29
JP2002352695A	2002-12-06
JP2010055907A	2010-03-11

Other References: