Title:
ELECTRIC FIELD EMITTING ELECTRON SOURCE AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/167048
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an electric field emitting electron source using a hexaboride single crystal having stable electron emission characteristics. The electric field emitting electron source (20) is configured such that a tip work piece (15) is cut out from a single crystal growth body (13) of hexaboride grown in a melt (liquid phase), and the forward extremity thereof in the length direction is sharpened and cleaned in order to form a crystal face terrace (facet) formed orthogonally to a crystallographic axis.
Inventors:
KUSUNOKI TOSHIAKI (JP)
NAKAYAMA TAKESHI (JP)
YAMAMOTO HIROYUKI (JP)
HASHIZUME TOMIHIRO (JP)
YAMAMOTO KENICHI (JP)
SAKAI YUSUKE (JP)
MURAKOSHI HISAYA (JP)
OSE YOICHI (JP)
NAKAYAMA TAKESHI (JP)
YAMAMOTO HIROYUKI (JP)
HASHIZUME TOMIHIRO (JP)
YAMAMOTO KENICHI (JP)
SAKAI YUSUKE (JP)
MURAKOSHI HISAYA (JP)
OSE YOICHI (JP)
Application Number:
PCT/JP2016/057109
Publication Date:
October 20, 2016
Filing Date:
March 08, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J1/30; H01J1/304; H01J9/02
Domestic Patent References:
| WO2014007121A1 | 2014-01-09 |
Foreign References:
| JPS4984358A | 1974-08-13 | |||
| JP2008177017A | 2008-07-31 | |||
| US20150054398A1 | 2015-02-26 | |||
| JPS5293264A | 1977-08-05 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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