Title:
ELECTRIC SIGNAL TRANSMISSION LINE
Document Type and Number:
WIPO Patent Application WO/2003/100861
Kind Code:
A1
Abstract:
An electric signal transmission line comprising a signal electrode section (2), a ground electrode section (3) and a dielectric section (4) which are formed on a semiconductor substrate (1). The signal electrode section (2) comprises a metal electrode (21) through which an electric signal flows, an upper conductive semiconductor (22) and a lower conductive semiconductor (23). The ground electrode section (3) comprises a grounded metal electrode (31) and a conductive semiconductor (32). In the upper conductive semi conductor (22) and the lower conductive semi conductor (23), the metal electrode (21) of the signal electrode section (2) is connected to the metal electrode (31) of the ground electrode unit (3) via semiconductor PN−junction by setting their polarities opposite to each other, the dielectric section (4) is formed by disposing a dielectric body in an area where electric lines of force run between the metal electrode (21) of the signal electrode section (2) and the metal electrode (31) of the ground electrode section (3). Thereby, the electric signal transmission line can rapidly transmit an electric signal and can be manufactured with stable quality by a conventional semiconductor process.
Inventors:
ITATANI TARO (JP)
YAGI SHUICHI (JP)
YAGI SHUICHI (JP)
Application Number:
PCT/JP2002/005071
Publication Date:
December 04, 2003
Filing Date:
May 24, 2002
Export Citation:
Assignee:
NAT INST OF ADVANCED IND SCIEN (JP)
ITATANI TARO (JP)
YAGI SHUICHI (JP)
ITATANI TARO (JP)
YAGI SHUICHI (JP)
International Classes:
B62D5/00; B62D5/04; B62D5/22; B62D6/00; H01L21/3205; H01L27/04; H01L27/08; H01P3/00; H01P3/02; B62D101/00; B62D113/00; B62D119/00; (IPC1-7): H01L27/04; H01P3/02; H01L21/3205
Foreign References:
| EP0311406A2 | 1989-04-12 | |||
| JPH0352302A | 1991-03-06 |
Other References:
HERRICK KATHERINE JULIET ET AL.: "Si-micromachined coplanar waveguides for use in high-frequency circuits", IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, vol. 46, no. 6, 1998, pages 762 - 768, XP000754868
Attorney, Agent or Firm:
Fukuda, Kenzo (6-13 Nishishinbashi 1-chom, Minato-ku Tokyo, JP)
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