Title:
ELECTRICAL CHARACTERISTIC ACQUIRING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/119417
Kind Code:
A1
Abstract:
The present disclosure addresses the problem of satisfactorily acquiring an open correction value. In an electrical characteristic acquiring device according to the present disclosure, an open correction value, which is an electrical characteristic for a case in which a distance between a pair of probes is a length, on an electrode side, of a component to be acquired, is obtained by calculation on the basis of a measured value of the electrical property for a case in which the distance between the pair of probes is a set length, the set length, and the length, on the electrode side, of the component. Therefore, an open correction value can be acquired accurately even if it is difficult to adjust a gap between the pair of probes. Further, it is not necessary to measure the open correction value each time the component to be acquired is changed, and the operational efficiency can be improved accordingly.
Inventors:
MIZUKOSHI TSUYOSHI (JP)
KIMURA MASASHI (JP)
MIZUTANI SHUHEI (JP)
KIMURA MASASHI (JP)
MIZUTANI SHUHEI (JP)
Application Number:
PCT/JP2021/047312
Publication Date:
June 29, 2023
Filing Date:
December 21, 2021
Export Citation:
Assignee:
FUJI CORP (JP)
International Classes:
G01R27/02; G01R35/00
Domestic Patent References:
| WO2020017019A1 | 2020-01-23 | |||
| WO2019130411A1 | 2019-07-04 |
Foreign References:
| JP2016191601A | 2016-11-10 | |||
| JP2016200583A | 2016-12-01 |
Attorney, Agent or Firm:
CHUBU PATENT OFFICE (JP)
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