ELECTRICAL POTENTIAL BARRIER MODULE HAVING HEAT TRANSFER PREVENTION FUNCTION AND LITHOGRAPHY DEVICE COMPRISING SAME

Title:

ELECTRICAL POTENTIAL BARRIER MODULE HAVING HEAT TRANSFER PREVENTION FUNCTION AND LITHOGRAPHY DEVICE COMPRISING SAME

Document Type and Number:

WIPO Patent Application WO/2023/249309

Kind Code:

A1

Abstract:

The present invention relates to an electrical potential barrier module having a heat transfer prevention function and a lithography device comprising same, and specifically relates to an electrical potential barrier module capable of performing the function of a pellicle in a lithography device, and a lithography device comprising same.

More Like This:

WO/2006/122577	METHOD OF DISTANCING A BUBBLE AND BUBBLE DISPLACEMENT APPARATUS
WO/2020/193367	METHOD OF DETERMINING A SET OF METROLOGY POINTS ON A SUBSTRATE, ASSOCIATED APPARATUS AND COMPUTER PROGRAM
JPS60217033	SLIGHTLY MOVING STAGE DEVICE

Inventors:

KIM KI-BUM (KR)
LEE JIN SEONG (KR)

Application Number:

PCT/KR2023/008153

Publication Date:

December 28, 2023

Filing Date:

June 13, 2023

Export Citation:

Click for automatic bibliography generation Help

Assignee:

DERKWOO SEMITECH CO LTD (KR)

International Classes:

G03F7/20

Foreign References:

KR20180067175A	2018-06-20
KR20100126775A	2010-12-02
KR20020016564A	2002-03-04
KR20070007848A	2007-01-16
JP2004332115A	2004-11-25

Attorney, Agent or Firm:

CHAE, Moon Young (KR)

Download PDF:

View/Download PDF PDF Help

Previous Patent: ELECTRICAL POTENTIAL BARRIER MODULE AND LITHOGRAPHY APPARATUS COMPRISING SAME

Next Patent: CARTRIDGE FOR AEROSOL GENERATING DEVICE INCLUDING VIBRATOR AND METHOD OF MANUFACTURING VIBRATOR