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Title:
ELECTRICALLY CONNECTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/190195
Kind Code:
A1
Abstract:
The present invention is provided with: a plurality of probes (10) of which a distal-end part comes into contact with a specimen (2) during measurement; and a space transformer (30) having a plurality of connection wirings (33) electrically connected to a base-end part of any of the plurality of probes (10), the space transformer (30) having a first terminal disposed on a first main surface (301) and a second terminal exposed on a second main surface (302), and there being formed on the first main surface a short-circuit wiring pattern in which the base-end parts of a plurality of same-potential probes, from among the plurality of probes (10), that are set to the same potential during measurement are electrically connected to the same connection wiring (33).

Inventors:
ITO TATSUYA (JP)
Application Number:
PCT/JP2018/014249
Publication Date:
October 18, 2018
Filing Date:
April 03, 2018
Export Citation:
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Assignee:
NIHON MICRONICS KK (JP)
International Classes:
G01R1/073; H01L21/66
Foreign References:
JP2014122872A2014-07-03
JP2015118064A2015-06-25
JP2012112771A2012-06-14
US20100117673A12010-05-13
Attorney, Agent or Firm:
MIYOSHI Hidekazu et al. (JP)
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