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Title:
ELECTRO-MECHANICAL SWITCH
Document Type and Number:
WIPO Patent Application WO/2006/077987
Kind Code:
A1
Abstract:
There is provided an electro-mechanical switch capable of performing high-speed switching response with a low drive voltage. An electro-mechanical switch main body (10) which is a MEMS switch includes a first movable electrode (14) and a second movable electrode (16) having both ends fixed and bridged by a first anchor (12) and a second anchor (13) formed on a silicon substrate (2) and a fixed electrode (18) opposing to these movable electrodes. The first movable electrode (14) having a relatively weak spring force and the fixed electrode (18) constitute a first electro-mechanical switch (22) which can be driven with a low voltage. The second movable electrode (16) having a relatively strong spring force and the fixed electrode (18) constitute a second electro-mechanical switch (24) which can be driven and latched with a low voltage. The first movable electrode (14) is rapidly displaced by a low drive voltage to rapidly turn on the first electro-mechanical switch and the second movable electrode (16) rapidly performs natural oscillation by the restoration force to rapidly turn off the second electro-mechanical switch. The returning second movable electrode (16) is latched with low drive voltage and the second electro-mechanical switch is turned on.

Inventors:
Nakanishi, Yoshito
Application Number:
PCT/JP2006/300889
Publication Date:
July 27, 2006
Filing Date:
January 20, 2006
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 57185, JP)
Nakanishi, Yoshito
International Classes:
H01H1/26; B81B3/00; H01H9/54; H01H55/00; H01H57/00; H01H59/00; H01H61/00
Foreign References:
JP2004327441A
JP2004134370A
JP2001084884A
JP2000311572A
JPH08212879A
JPS5435376U
Attorney, Agent or Firm:
Takamatsu, Takeshi (Eikoh Patent Office, 7-13 Nishi-Shimbashi 1-chom, Minato-ku Tokyo 03, 10500, JP)
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