Title:
ELECTROCHEMICAL MECHANICAL PROCESSING WITH ADVANCIBLE SWEEPER
Document Type and Number:
WIPO Patent Application WO2003041126
Kind Code:
A3
Abstract:
The present invention provides an apparatus for electrochemical mechanical processing of a surface of a workpiece by utilizing a process solution. The apparatus of the present invention includes an electrode touching the process solution, a belt workpiece surface influencing device extended between a supply spool and a receiving spool. During the process, the surface of the workpiece is placed in proximity of the workpiece surface influencing device and the process solution is flowed through the process section and onto the surface while a potential difference is applied between the electrode and the surface of the workpiece.
Inventors:
BASOL BULENT M
YAKUPOGLU HALIT N
UZOH CYPRIAN E
TALIEH HOMAYOUN
YAKUPOGLU HALIT N
UZOH CYPRIAN E
TALIEH HOMAYOUN
Application Number:
PCT/US2002/035398
Publication Date:
November 06, 2003
Filing Date:
November 04, 2002
Export Citation:
Assignee:
NUTOOL INC (US)
International Classes:
B24B7/22; B24B21/04; B24B37/04; C25D5/22; C25D7/12; C25F3/30; H01L21/288; H01L21/304; H01L21/768; (IPC1-7): B24B21/04; B24B37/04; C25D5/22; H01L21/288
Domestic Patent References:
| WO2002029859A2 | 2002-04-11 | |||
| WO2002057514A2 | 2002-07-25 |
Foreign References:
| US6176992B1 | 2001-01-23 | |||
| US6241583B1 | 2001-06-05 |
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