Title:
ELECTROCONDUCTIVE-PARTICLE-PLACEMENT FILM, METHOD FOR MANUFACTURING SAME, INSPECTION PROBE UNIT, AND CONTINUITY INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/101107
Kind Code:
A1
Abstract:
This electroconductive particle placement film, which is useful as an inspection probe unit for inspecting the continuity of objects that are to be subjected to fine-pitch continuity inspection such as semiconductor devices, has electroconductive particles placed in the planar direction of an elastomer film. The thickness of the elastomer film approximately matches the average particle diameter of the electroconductive particles. The end parts of the electroconductive particles are positioned near the respectively farthest outer surface of both surfaces of the elastomer film. Same or different electroconductive particle placement films may be laminated. An adhesive layer may also be formed on at least one surface of the electroconductive particle placement film.
Inventors:
HAYASHI SHINICHI (JP)
AKUTSU YASUSHI (JP)
AKUTSU YASUSHI (JP)
Application Number:
PCT/JP2017/041699
Publication Date:
June 07, 2018
Filing Date:
November 20, 2017
Export Citation:
Assignee:
DEXERIALS CORP (JP)
International Classes:
H01R11/01; G01R1/06; G01R31/26; H01L21/66; H01R43/00
Foreign References:
| JP2013037944A | 2013-02-21 | |||
| JPH10200242A | 1998-07-31 | |||
| JPH08148213A | 1996-06-07 | |||
| JP2014060150A | 2014-04-03 | |||
| JP2001052793A | 2001-02-23 | |||
| JP2011038831A | 2011-02-24 | |||
| JP2004288911A | 2004-10-14 |
Attorney, Agent or Firm:
TAJIME & TAJIME (JP)
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