Title:
ELECTRODE CIRCUIT, FILM FORMATION DEVICE, ELECTRODE UNIT, AND FILM FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2010/055669
Kind Code:
A1
Abstract:
Provided is an electrode circuit for the plasma CVD. The electrode circuit includes: an AC power source, a matching circuit connected to the AC power source, and a parallel flat electrode formed by an anode and a cathode which are arranged so that the electrode face of the anode and that of the cathode oppose to each other. The matching circuit, the parallel flat electrode, and plasma generated by the parallel flat electrode constitute a balanced circuit.
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Inventors:
MATSUMOTO KOICHI (JP)
YODA HIDENORI (JP)
OKAYAMA SATOHIRO (JP)
MORIOKA YAWARA (JP)
YAJIMA TARO (JP)
YODA HIDENORI (JP)
OKAYAMA SATOHIRO (JP)
MORIOKA YAWARA (JP)
YAJIMA TARO (JP)
Application Number:
PCT/JP2009/006059
Publication Date:
May 20, 2010
Filing Date:
November 12, 2009
Export Citation:
Assignee:
ULVAC INC (JP)
MATSUMOTO KOICHI (JP)
YODA HIDENORI (JP)
OKAYAMA SATOHIRO (JP)
MORIOKA YAWARA (JP)
YAJIMA TARO (JP)
MATSUMOTO KOICHI (JP)
YODA HIDENORI (JP)
OKAYAMA SATOHIRO (JP)
MORIOKA YAWARA (JP)
YAJIMA TARO (JP)
International Classes:
C23C16/509; H01L21/205; H01L31/04; H05H1/46
Foreign References:
| JPH0327120U | 1991-03-19 | |||
| JPS60202929A | 1985-10-14 | |||
| JP2007329071A | 2007-12-20 | |||
| JPS618914A | 1986-01-16 | |||
| JP2005158980A | 2005-06-16 | |||
| JP2004311837A | 2004-11-04 |
Attorney, Agent or Firm:
SHIGA, Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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