Title:
ELECTRODE FIXING ASSEMBLY AND DRY ETCHING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/216318
Kind Code:
A1
Abstract:
An electrode fixing assembly and a dry etching apparatus. The electrode fixing assembly comprises a first fixing member and a second fixing member, wherein the hardness of the material of the first fixing member is greater than that of the material of the second fixing member. The electrode fixing assembly is arranged in the dry etching apparatus to fix an upper electrode to an apparatus body, such that generation of particulate matter can be reduced or eliminated, thereby avoiding the problem of poor etching caused by the particulate matter covering a substrate to be etched, etc.
Inventors:
LI ZHIYUAN (CN)
ZENG XIANFU (CN)
ZENG XIANFU (CN)
Application Number:
PCT/CN2022/094683
Publication Date:
November 16, 2023
Filing Date:
May 24, 2022
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L21/67; H01J37/32
Foreign References:
| CN102154630A | 2011-08-17 | |||
| CN114284127A | 2022-04-05 | |||
| CN210607176U | 2020-05-22 | |||
| CN111415855A | 2020-07-14 | |||
| US20210403337A1 | 2021-12-30 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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