Title:
ELECTRODE, SOLID ELEMENT AND DEVICE USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2004/027111
Kind Code:
A1
Abstract:
A solid element including an electrode, characterized in that it has either of a boron carbon nitrogen film and a boron carbon nitrogen oxygen film which have a composition ratio for carbon of 0.15 or more. The above films exhibit excellent resistance to water and is suppressed with respect to the occurrence of cracking or exfoliation thereof, without detriment to excellent characteristics of a conventional BN film.
Inventors:
SUGINO TAKASHI (JP)
KUSUHARA MASAKI (JP)
UMEDA MASARU (JP)
KUSUHARA MASAKI (JP)
UMEDA MASARU (JP)
Application Number:
PCT/JP2003/012097
Publication Date:
April 01, 2004
Filing Date:
September 22, 2003
Export Citation:
Assignee:
WATANABE M & CO LTD (JP)
SUGINO TAKASHI (JP)
KUSUHARA MASAKI (JP)
UMEDA MASARU (JP)
SUGINO TAKASHI (JP)
KUSUHARA MASAKI (JP)
UMEDA MASARU (JP)
International Classes:
G01N23/227; C01B21/082; C23C16/30; C23C16/36; C23C16/38; H01J1/30; H01J1/304; H01J11/22; H01J11/34; H01J23/06; H01J29/04; H01J31/12; H01J37/073; H01J61/067; H01J63/06; H01L21/28; H01L29/26; H01L29/417; (IPC1-7): C23C16/38; C01B21/082; H01J1/304; H01J11/02; H01J23/06; H01J29/04; H01J31/12; H01J37/073; H01J63/06; H01L21/314; H01L21/768
Foreign References:
| JP2001185021A | 2001-07-06 | |||
| JP2002015659A | 2002-01-18 |
Attorney, Agent or Firm:
Fukumori, Hisao (5-11 Kudanminami 4-chom, Chiyoda-ku Tokyo, JP)
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