Title:
ELECTRODELESS EXCIMER LAMP
Document Type and Number:
WIPO Patent Application WO/2024/063362
Kind Code:
A1
Abstract:
The present invention relates to an electrodeless excimer lamp and, more specifically, to an electrodeless excimer lamp having a sealed structure in which an inert gas is enclosed. The electrodeless excimer lamp according to the present invention comprises: a discharge unit for emitting vacuum ultraviolet rays by discharge generated by radio frequency (RF) power; a high voltage application unit provided to receive the high voltage (HV) required to start the excimer lamp by using RF power; and a getter receiving unit in which a getter material for removing impurities in the excimer lamp is located. Therefore, a high output operation can be performed in an electrodeless discharge manner without operation delay.
Inventors:
LEE DONG HOON (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
JUNG DONG GIL (KR)
JANG HO KYUNG (KR)
LIM JI HYUNG (KR)
RYU SEOK KYEONG (KR)
KIM JEONG DONG (KR)
LEE BYUNG JOON (KR)
LEE SU YOUNG (KR)
JUNG DONG GIL (KR)
JANG HO KYUNG (KR)
LIM JI HYUNG (KR)
RYU SEOK KYEONG (KR)
KIM JEONG DONG (KR)
Application Number:
PCT/KR2023/012769
Publication Date:
March 28, 2024
Filing Date:
August 29, 2023
Export Citation:
Assignee:
SUNJE HI TEK CO LTD (KR)
International Classes:
H01J65/04; H01J61/26; H01J61/54
Domestic Patent References:
| WO2010032849A1 | 2010-03-25 |
Foreign References:
| JP2010257875A | 2010-11-11 | |||
| JP2775695B2 | 1998-07-16 | |||
| JP2012212576A | 2012-11-01 | |||
| JP2018106805A | 2018-07-05 |
Attorney, Agent or Firm:
KWAK, Chul Keun (KR)
Download PDF: