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Title:
ELECTROMAGNETIC IMPEDANCE MEASUREMENT DEVICE AND ELECTROMAGNETIC IMPEDANCE CALIBRATION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/074646
Kind Code:
A1
Abstract:
The present invention provides an electromagnetic impedance measurement device. The electromagnetic impedance measurement device comprises: a network analyzer including a first port and a second port and measuring scattering parameters according to frequencies; and a multilayer substrate connected to the first port and the second port by a coaxial cable respectively, including a via for connecting conductive layers, and comprising three or more conductive layers including at least an uppermost layer, a lowermost layer, and an intermediate layer. The multilayer substrate comprises: a test sample placed between the uppermost layer and the lowermost layer; a through calibration sample placed between the uppermost layer and the lowermost layer; a reflect calibration sample placed between the uppermost layer and the lowermost layer; and a line calibration sample placed between the uppermost layer and the lowermost layer. The test sample, the through calibration sample, the reflect calibration sample, and the line calibration sample are connected by a first error box and a second error box respectively, each of the first and second error boxes including the via having the same structure.

Inventors:
HONG YOUNG-PYO (KR)
KOO HYUNJI (KR)
KANG NO-WEON (KR)
LEE DONG-JOON (KR)
Application Number:
PCT/KR2016/012116
Publication Date:
April 26, 2018
Filing Date:
October 27, 2016
Export Citation:
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Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
G01R27/28; G01R35/00
Foreign References:
KR20110070902A2011-06-24
US20050256658A12005-11-17
JPH10197577A1998-07-31
JPH0688844A1994-03-29
Other References:
LIN, LI: "On the thru-reflect-line (TRL) numerical calibration and error analysis for parameter extraction of circuit model", INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, vol. 16, no. 5, 18 July 2006 (2006-07-18), XP055604773, DOI: 10.1002/mmce.20167
ENGEN: "Thru-Reflect-Line: An Improved Technique for Calibrating the Dual Six-Port Automatic Network Analyzer", IEEE TRANSACTIONS MICROWAVE THEORY AND TECHNIQUES, vol. 27, no. 12, December 1979 (1979-12-01), pages 987 - 993, XP001084385, DOI: doi:10.1109/TMTT.1979.1129778
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
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