Title:
ELECTROMAGNETIC WAVE DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/013018
Kind Code:
A1
Abstract:
The present invention includes: a substrate that has a top surface and a bottom surface which is the side opposite the top surface; a plurality of electromagnetic wave detection elements that are arrayed on the top surface of the substrate so as to be spaced apart from each other; and a reflection structure that is formed on the bottom surface of the substrate and that has non-reflection regions at positions facing the regions between the plurality of electromagnetic wave detection elements in the array direction of the plurality of electromagnetic wave detection elements.
Inventors:
YAMAGUCHI ATSUSHI (JP)
Application Number:
PCT/JP2018/024825
Publication Date:
January 17, 2019
Filing Date:
June 29, 2018
Export Citation:
Assignee:
PIONEER CORP (JP)
International Classes:
G01J1/04; G01J1/02; H01L27/146
Foreign References:
| JP2010050260A | 2010-03-04 | |||
| JP2011222900A | 2011-11-04 | |||
| JPH07245383A | 1995-09-19 | |||
| JP2011232606A | 2011-11-17 | |||
| JPS6278874A | 1987-04-11 | |||
| JPH02119476A | 1990-05-07 | |||
| JPS62102558A | 1987-05-13 |
Attorney, Agent or Firm:
LEXT, P.C. (JP)
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