Title:
ELECTROMECHANICAL CONVERSION ELEMENT, METHOD FOR MANUFACTURING SAME, AND LIQUID DISCHARGE HEAD
Document Type and Number:
WIPO Patent Application WO/2022/168267
Kind Code:
A1
Abstract:
The problem addressed by the present invention is to provide: an electromechanical conversion element with which decreases over time in displacement of a piezoelectric body when continuously pulse-driven over a long period in a high-temperature environment are suppressed; a method for manufacturing the electromechanical conversion element; and a liquid discharge head equipped with the electromechanical conversion element. This electromechanical conversion element comprises a first electrode disposed on a substrate, an electromechanical conversion layer, and a second electrode, wherein: a first high-temperature resistance layer containing a metal oxide is provided between the first electrode and the electromechanical conversion layer, and a second high-temperature resistance layer containing a metal oxide is provided between the electromechanical conversion layer and the second electrode; the electromechanical conversion layer contains perovskite crystals; and the degree of orientation of a (001) face is at least 99.0% in X-ray diffractometry of the electromechanical conversion layer.
Inventors:
MASHIMA HIDEKI (JP)
HARA SHINTARO (JP)
HARA SHINTARO (JP)
Application Number:
PCT/JP2021/004335
Publication Date:
August 11, 2022
Filing Date:
February 05, 2021
Export Citation:
Assignee:
KONICA MINOLTA INC (JP)
International Classes:
H01L41/09; H01L41/187
Foreign References:
| JP2017191928A | 2017-10-19 | |||
| JP2020198366A | 2020-12-10 | |||
| JP2020140976A | 2020-09-03 | |||
| JP2014199910A | 2014-10-23 |
Attorney, Agent or Firm:
KOYO INTERNATIONAL PATENT FIRM (JP)
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