Title:
ELECTROMECHANICAL MICROSWITCH FOR SWITCHING AN ELECTRICAL SIGNAL, MICROELECTROMECHANICAL SYSTEM, INTEGRATED CIRCUIT, AND METHOD FOR PRODUCING AN INTEGRATED CIRCUIT
Document Type and Number:
WIPO Patent Application WO/2011/069988
Kind Code:
A3
Abstract:
The invention relates to a microelectromechanical system (MEMS) (100, 200) having an electromechanical microswitch (1) for switching an electrical signal (S), in particular a radio frequency signal (RFMEMS), in particular in the GHz range. Said system comprises, according to the invention: a multi-level conductor stack (102, 202) disposed on a substrate (101, 201), the conductors (111-115, 211-215) thereof being insulated from each other in different conductor levels (M1-M5) by means of electrically insulating layers (103, 203) and electrically connected to each other by means of interlayer contacts (104, 204), the electromechanical switch (1) integrated in a recess (105, 205) of the multilevel conductor stack (102, 202) and having a contact link (10), a counter-contact (20), and at least one drive electrode (30, 50) for the contact link (10), wherein the contact link (10), the counter-contact (20), and the at least one drive electrode (30, 50) each are part of a conductor level (M1-M5) of the multilevel conductor stack (102, 202).
Inventors:
KAYNAK MEHMET (DE)
BIRKHOLZ MARIO (DE)
TILLACK BERND (DE)
EHWALD KARL-ERNST (DE)
SCHOLZ RENE (DE)
BIRKHOLZ MARIO (DE)
TILLACK BERND (DE)
EHWALD KARL-ERNST (DE)
SCHOLZ RENE (DE)
Application Number:
PCT/EP2010/069019
Publication Date:
September 15, 2011
Filing Date:
December 07, 2010
Export Citation:
Assignee:
IHP GMBH (DE)
KAYNAK MEHMET (DE)
BIRKHOLZ MARIO (DE)
TILLACK BERND (DE)
EHWALD KARL-ERNST (DE)
SCHOLZ RENE (DE)
KAYNAK MEHMET (DE)
BIRKHOLZ MARIO (DE)
TILLACK BERND (DE)
EHWALD KARL-ERNST (DE)
SCHOLZ RENE (DE)
International Classes:
H01H59/00
Domestic Patent References:
| WO2006120810A1 | 2006-11-16 |
Foreign References:
| DE102006061386B3 | 2008-06-19 | |||
| US20070018761A1 | 2007-01-25 | |||
| DE102007031128A1 | 2009-01-02 | |||
| US20050248423A1 | 2005-11-10 | |||
| US20060012940A1 | 2006-01-19 | |||
| EP1677328A1 | 2006-07-05 | |||
| US20090146226A1 | 2009-06-11 | |||
| US20060056132A1 | 2006-03-16 | |||
| DE4437259C1 | 1995-10-19 | |||
| EP1321957A1 | 2003-06-25 |
Attorney, Agent or Firm:
EISENFÜHR SPEISER & PARTNER (Berlin, DE)
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