ELECTROMECHANICAL SYSTEMS VARIABLE CAPACITANCE ASSEMBLY

WIPO Patent Application WO/2013/106145

A3

This disclosure provides systems, methods and apparatus for a variable capacitance apparatus. In one aspect, an apparatus includes a plurality of electromechanical systems varactors connected in parallel. Each of the plurality of electromechanical systems varactors includes a first, a second, and a third metal layer. The first metal layer includes a first bias electrode. The second metal layer is spaced apart from the first metal layer to define a first air gap, and includes a first radio frequency electrode. A third metal layer is spaced apart from the second metal layer to define a second air gap, and includes a second radio frequency electrode and a second bias electrode. The second bias electrode of each of the plurality of electromechanical systems varactors has a different projected area perpendicular to a surface of the second metal layer and onto the surface of the second metal layer.

LAN JE-HSIUNG (US)
GOUSEV EVGENI PETROVICH (US)
PARK SANG-JUNE (US)
ZHANG WENYUE (US)

PCT/US2012/068401

November 28, 2013

December 07, 2012

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QUALCOMM MEMS TECHNOLOGIES INC (US)

H01G5/16

US20110149374A1	2011-06-23
US20020079743A1	2002-06-27

SHAKHRAI M V: "Microelectromechanical (mems) varactors for mobile communications", ELECTRON DEVICES AND MATERIALS, 2003. PROCEEDINGS. 4TH ANNUAL 2003 SIB ERIAN RUSSIAN WORKSHOP ON JULY 1-4, 2003, PISCATAWAY, NJ, USA,IEEE, 1 July 2003 (2003-07-01), pages 3 - 9, XP010654351, ISBN: 978-5-7782-0412-6

GRIFFITH, John, F. et al. (P.O. Box 70250Oakland, CA, US)

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