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Title:
ELECTROMECHANICAL TRANSDUCER
Document Type and Number:
WIPO Patent Application WO/2013/073374
Kind Code:
A3
Abstract:
An electromechanical transducer includes a plurality of cells arranged on a substrate, each cell having a first electrode and a second electrode disposed opposite to the first electrode with a gap interposed between them. A plurality of elements, each including at least two cells with their first electrodes or second electrodes electrically connected to each other, are arranged in the transducer. Vibration film structures that includes respective vibration films disposed above the substrate with a gap between them are arranged in the intervals which are devoid of elements separating the plurality of elements. With this structure, the non-uniformity of the radiation impedances of the plurality of elements due to the intervals separating the regions where the elements are respectively arranged can be reduced and hence the influence of the intervals separating the elements on the transmission/reception characteristics can also be reduced.

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Inventors:
KANDORI ATSUSHI (JP)
AKIYAMA TAKAHIRO (JP)
Application Number:
PCT/JP2012/078265
Publication Date:
November 28, 2013
Filing Date:
October 25, 2012
Export Citation:
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Assignee:
CANON KK (JP)
International Classes:
B06B1/02; G01H11/06
Domestic Patent References:
WO2010146838A22010-12-23
Foreign References:
US20110182149A12011-07-28
EP1764162A12007-03-21
Other References:
ALPER OZGURLUK ET AL: "Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers in collapsed state", ULTRASONICS SYMPOSIUM (IUS), 2011 IEEE INTERNATIONAL, IEEE, 18 October 2011 (2011-10-18), pages 1020 - 1023, XP032230614, ISBN: 978-1-4577-1253-1, DOI: 10.1109/ULTSYM.2011.0250
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (1-6-5 Marunouchi Chiyoda-k, Tokyo 05, JP)
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