ELECTRON BEAM APPLICATION DEVICE

WIPO Patent Application WO/2022/219814

A1

A light source 7 for emitting pulse excitation light is provided with: a laser light source 24; a light distributor 103 for distributing a pulse laser beam emitted by the laser light source into a plurality of pulse laser beams; a phase adjuster 104 and an optical amplifier 105 provided for each of the plurality of pulse laser beams; an optical coupler 106 for coupling the plurality of phase-adjusted and amplified pulse laser beams for outputting as pulse excitation light; a phase control device 104 for controlling the phase delay amount of the phase adjuster; and, an optical monitor 107 for detecting the inclination of the pulse excitation light relative to the optical axis of a condenser lens. The phase control device retains phase delay amount data indicating the phase delay amount of each of a plurality of phase adjusters the inclination of which is a prescribed value, and sets the phase delay amount of each of the plurality of phase adjusters on the basis of the phase delay amount data.

JPH07192607	POLARIZED ELECTRON BEAM GENERATING ELEMENT
JPS6057181	[Title of the Invention] Electric field radiation type electron gun
JP6925090	Electron gun, electron beam application device and irradiation position movement method

OHSHIMA TAKASHI (JP)
KOHMU NAOHIRO (JP)
MORISHITA HIDEO (JP)
IDE TATSURO (JP)
OSE YOICHI (JP)
KATANE JUNICHI (JP)
AGEMURA TOSHIHIDE (JP)

PCT/JP2021/015741

October 20, 2022

April 16, 2021

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HITACHI HIGH TECH CORP (JP)

H01J37/073

JP2014216418A	2014-11-17
JP2012093675A	2012-05-17
JP2003506828A	2003-02-18

KLENK ARNO, ET AL.: "Coherent Beam Combination of Ultrafast Fiber Lasers", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, vol. 24, no. 5, 27 February 2018 (2018-02-27), XP055980660

POLAIRE I.P.C. (JP)

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