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Title:
ELECTRON BEAM EXPOSURE SYSTEM
Document Type and Number:
WIPO Patent Application WO2004040614
Kind Code:
A3
Abstract:
The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target (14), comprising: a beamlet generator for generating a plurality of electron beamlets (5a, 5b); a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optical system comprising an array of electrostatic lenses (7) wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Inventors:
WIELAND MARCO JAN-JACO (NL)
KAMPHERBEEK BERT JAN (NL)
VAN VEEN ALEXANDER HENDRIK VIN (NL)
KRUIT PIETER (NL)
Application Number:
NL0300745W
Publication Date:
September 16, 2004
Filing Date:
October 30, 2003
Export Citation:
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Assignee:
MAPPER LITHOGRAPHY IP B.V.
WIELAND, MARCO, JAN-JACO
KAMPHERBEEK, BERT, JAN
VAN VEEN, ALEXANDER, HENDRIK, VINCENT
KRUIT, PIETER
International Classes:
A61N5/00; G01Q30/02; G01Q30/08; G03B1/00; H01J37/08; H01J37/30; H01J37/304; H01J37/317; (IPC1-7): H01J37/302; H01J37/317; H01J37/304; G03F7/20
Domestic Patent References:
WO2002043102A12002-05-30
WO2002041372A12002-05-23
Foreign References:
GB2340991A2000-03-01
EP1300870A12003-04-09
Other References:
PATENT ABSTRACTS OF JAPAN vol. 2002, no. 08 5 August 2002 (2002-08-05)
JONES G W ET AL: "MICROSTRUCTURES FOR PARTICLE BEAM CONTROL", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 6, no. 6, 1 November 1988 (1988-11-01), pages 2023 - 2027, XP000001001, ISSN: 0734-211X
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