Title:
ELECTRON BEAM IRRADIATION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/088334
Kind Code:
A1
Abstract:
An electron beam irradiation apparatus with which it is possible to irradiate an electron beam (B) from an electron beam generation source surrounded by a vacuum chamber to the outside of the vacuum chamber via an electron beam irradiation window (4). The electron beam irradiation window (4) has a grid (6), window foil (9) through which the electron beam can pass, and a frame-shaped pressing member (10) for pressing the window foil (9) against the grid (6). The front surface of the grid (6) is provided with an annular groove section (81). A metal gasket (11) is pressed between the groove section (81) and the window foil (9).
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Inventors:
DAIKU HIROYUKI (JP)
SAKAI ICHIRO (JP)
INOUE NORIHIRO (JP)
TERASAKA YOHEI (JP)
SAKAI ICHIRO (JP)
INOUE NORIHIRO (JP)
TERASAKA YOHEI (JP)
Application Number:
PCT/JP2017/039788
Publication Date:
May 17, 2018
Filing Date:
November 02, 2017
Export Citation:
Assignee:
HITACHI SHIPBUILDING ENG CO (JP)
International Classes:
G21K5/00; A61L2/08; B65B55/04; B65B55/08; G21K5/04
Foreign References:
JP2013160721A | 2013-08-19 | |||
JPS55120000U | 1980-08-25 | |||
JP2001013300A | 2001-01-19 | |||
JP2010008386A | 2010-01-14 | |||
JP2013160721A | 2013-08-19 |
Other References:
See also references of EP 3540744A4
Attorney, Agent or Firm:
MORIMOTO INT'L PATENT OFFICE (JP)
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