Title:
ELECTRON BEAM IRRADIATOR AND IRRADIATION SYSTEM WITH EMISSION DETECTION
Document Type and Number:
WIPO Patent Application WO/2015/125418
Kind Code:
A1
Abstract:
An electron beam irradiator 7 of the present invention includes: an vacuum chamber 1 having an interior in a vacuum state; an electron beam generator 6 provided in the vacuum chamber 1 to generate electron beams; a window structure 5 including a transmission window for emitting electron beams generated by the electron beam generator 6 to the outside of the vacuum chamber 1 and a thin portion that covers the transmission window to keep the vacuum state in the vacuum chamber and allows transmission of electron beams; an insulating separator 4 that separates the window structure 5 and the vacuum chamber 1; an insulating cover 3 shaped like a layer covering the outer surface of the window structure 5; and a conductive layer 2 that is provided over the outer surfaces of the insulating separator 4 and the insulating cover 3 and is grounded.
Inventors:
BAKHTARI KAVEH
Application Number:
PCT/JP2015/000380
Publication Date:
August 27, 2015
Filing Date:
January 29, 2015
Export Citation:
Assignee:
HITACHI SHIPBUILDING ENG CO (JP)
International Classes:
H01J33/02; A61L2/00; G21K5/00; H01J33/04
Domestic Patent References:
| WO2007145560A1 | 2007-12-21 |
Foreign References:
| JP2006162535A | 2006-06-22 | |||
| US20070090303A1 | 2007-04-26 | |||
| EP1194944A1 | 2002-04-10 | |||
| JP2011026000A | 2011-02-10 | |||
| JP2013093145A | 2013-05-16 |
Attorney, Agent or Firm:
MORIMOTO INT'L PATENT OFFICE (4-1 Nishi-Honmachi 1-chome, Nishi-ku, Osaka-sh, Osaka 05, JP)
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