Title:
ELECTRON CYCLOTRON RESONANCE ION SOURCE APPARATUS AND METHOD FOR BOOSTING EXTRACTION CURRENT
Document Type and Number:
WIPO Patent Application WO/2013/077555
Kind Code:
A1
Abstract:
The present invention relates to an electron cyclotron resonance (ECR) ion source apparatus and to a method for boosting extraction current. The electron cyclotron resonance ion source apparatus includes: a plasma chamber in which plasma is generated; a magnet part applying a magnetic field into the plasma chamber; a microwave generation part applying microwaves into the plasma chamber; an ion extraction part extracting ions generated by plasma from the plasma chamber by ECR of the magnetic field and the microwaves; and a magnetic field adjusting part disposed inside or outside the plasma chamber to adjust the intensity of the magnetic field applied by the magnet part. The ECR ion source apparatus may expand an ECR region by means of a magnetic adjusting material disposed inside and/or outside of the plasma chamber.
Inventors:
LEE BYOUNG SEOB (KR)
WON MI SOOK (KR)
YOON JANG HEE (KR)
CHOI SE YONG (KR)
OK JUNG WOO (KR)
WON MI SOOK (KR)
YOON JANG HEE (KR)
CHOI SE YONG (KR)
OK JUNG WOO (KR)
Application Number:
PCT/KR2012/008586
Publication Date:
May 30, 2013
Filing Date:
October 19, 2012
Export Citation:
Assignee:
KOREA BASIC SCIENCE INST (KR)
International Classes:
H01J37/08; H01J27/02
Foreign References:
| KR20110061135A | 2011-06-09 | |||
| KR20090062069A | 2009-06-17 | |||
| KR20070015937A | 2007-02-06 |
Attorney, Agent or Firm:
KIM, SUN-YOUNG (KR)
κΉμμ (KR)
κΉμμ (KR)
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Claims: