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Patent Searching and Data


Title:
ELECTRON DETECTOR INCLUDING AN INTIMATELY-COUPLED SCINTILLATOR-PHOTOMULTIPLIER COMBINATION, AND ELECTRON MICROSCOPE AND X-RAY DETECTOR EMPLOYING SAME
Document Type and Number:
WIPO Patent Application WO/2012/016198
Kind Code:
A3
Abstract:
A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system structured to direct the electron beam toward a specimen positioned in a sample chamber to which the electron column is coupled, and an electron detector. The electron detector includes one or more assemblies positioned within the electron column or the sample chamber, each of the assemblies including an SiPM and a scintillator directly connected face-to-face to an active light sensing surface of the SiPM without a light transporting device being positioned in between the scintillator and the SiPM.

Inventors:
BARBI, Nicholas, C. (882 Sumter Drive, Yardley, Pennsylvania, 19067, US)
LOPOUR, Felip (Preslova 17, Brno, CZ)
PIEDMONTE, Claudio (via di Castel, Rocca 15 Pergine Valsugana, Trento, 28047, IT)
MOTT, Richard, B. (328 Rileyville Road, Ringoes, New Jersey, 08551-1501, US)
Application Number:
US2011/045988
Publication Date:
March 27, 2014
Filing Date:
July 29, 2011
Export Citation:
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Assignee:
PULSETOR, LLC (328 Rileyville Road, Ringoes, New Jersey, 08551-1501, US)
BARBI, Nicholas, C. (882 Sumter Drive, Yardley, Pennsylvania, 19067, US)
LOPOUR, Felip (Preslova 17, Brno, CZ)
PIEDMONTE, Claudio (via di Castel, Rocca 15 Pergine Valsugana, Trento, 28047, IT)
MOTT, Richard, B. (328 Rileyville Road, Ringoes, New Jersey, 08551-1501, US)
International Classes:
H01J3/14
Foreign References:
US20080308742A12008-12-18
US20080317200A12008-12-25
US6811850B12004-11-02
US20050127294A12005-06-16
US20080155990A12008-07-03
US20060243908A12006-11-02
US20100080351A12010-04-01
US7297914B22007-11-20
Other References:
See also references of EP 2599103A4
Attorney, Agent or Firm:
LEVY, Philip, E. et al. (Eckert Seamans Cherin & Mellott, LLC600 Grant Street, 44th Floo, Pittsburgh Pennsylvania, 15219, US)
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