Title:
ELECTRON DISCHARGE ELEMENT AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2006/064634
Kind Code:
A1
Abstract:
An electron discharge element includes: a lower electrode (2) near to a substrate and an upper electrode (7) far from the substrate; insulation layers (5, 6) layered between the lower electrode (2) and the upper electrode (7) and an electron supply layer (4). The electron discharge element discharges electrons from the upper electrode (7) when voltage is applied across the lower electrode (2) and the upper electrode (7). The electron discharge element further includes an electron discharge unit (14) having an opening formed by a stepwise inner wall of the insulation layers (5, 6) whose film thickness is stepwise reduced; and a carbon region (8) connected to the upper electrode (7), arranged in contact with the insulation layers (5, 6) and the electron supply layer (4), and containing carbon. Thus, it is possible to create an element having the same electron discharge characteristic as an electron discharge element in which the insulation layer film thickness is gradually reduced, without using minute particles or a micro-mask.
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Inventors:
Nakada, Tomonari c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Negishi, Nobuyasu c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Sakamura, Kazuto c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Okuda, Yoshiyuki c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Watanabe, Atsushi c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Ogasawara, Kiyohide c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Negishi, Nobuyasu c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Sakamura, Kazuto c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Okuda, Yoshiyuki c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Watanabe, Atsushi c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Ogasawara, Kiyohide c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Application Number:
PCT/JP2005/021321
Publication Date:
June 22, 2006
Filing Date:
November 15, 2005
Export Citation:
Assignee:
PIONEER CORPORATION (4-1 Meguro 1-chome, Meguro-ku Tokyo, 54, 15386, JP)
Nakada, Tomonari c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Negishi, Nobuyasu c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Sakamura, Kazuto c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Okuda, Yoshiyuki c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Watanabe, Atsushi c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Ogasawara, Kiyohide c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Nakada, Tomonari c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Negishi, Nobuyasu c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Sakamura, Kazuto c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Okuda, Yoshiyuki c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Watanabe, Atsushi c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Ogasawara, Kiyohide c/o Corporate Research and Develoment Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
International Classes:
H01J1/312; H01J9/02
Attorney, Agent or Firm:
Fujimura, Motohiko (FUJIMURA PATENT BUREAU, Togeki Bldg. 1-1, Tsukiji 4-chom, Chuo-ku Tokyo, 104-0045, JP)
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