Title:
ELECTRON EMISSION THIN FILM, PLASMA DISPLAY PANEL COMPRISING IT AND METHOD OF MANUFACTURING THEM
Document Type and Number:
WIPO Patent Application WO/2001/086685
Kind Code:
A1
Abstract:
An electron emission thin film having excellent secondary electron emission properties when compared with conventional ones, a plasma display panel comprising it and a method for manufacturing them. A protective layer comprising a thin film of MgO is formed on a dielectric layer formed on a front glass substrate using a vacuum deposition system. The angles between the front glass substrate and the lines connecting the central point of a target be become the composition of the protective layer with the central point and the opposite end points of the front glass substrate lie respectively, in the range of 30-80°. At least a part of the columnar crystal of MgO constituting the protective layer thereby has a flat face inclining with respect to the surface of the thin film.
Inventors:
Kotera, Koichi (14-3-1101, Nakanocho 5-chome Miyakojimaku Osaka-shi, Osaka, 534-0027, JP)
Ooe, Yoshinao (35-10, Kawashimakitauracho Nishikyouku Kyoto-shi, Kyoto, 615-8107, JP)
Kono, Hiroki (2-6-3-517, Kasuga Suita-shi, Osaka, 565-0853, JP)
Tanaka, Hiroyosi (288-3, Kiyomizu 1-chome Higashiyama-ku Kyoto-shi, Kyoto, 605-0862, JP)
Ooe, Yoshinao (35-10, Kawashimakitauracho Nishikyouku Kyoto-shi, Kyoto, 615-8107, JP)
Kono, Hiroki (2-6-3-517, Kasuga Suita-shi, Osaka, 565-0853, JP)
Tanaka, Hiroyosi (288-3, Kiyomizu 1-chome Higashiyama-ku Kyoto-shi, Kyoto, 605-0862, JP)
Application Number:
PCT/JP2001/003938
Publication Date:
November 15, 2001
Filing Date:
May 11, 2001
Export Citation:
Assignee:
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1006, OazaKadoma Kadoma-shi, Osaka, 571-8501, JP)
Kotera, Koichi (14-3-1101, Nakanocho 5-chome Miyakojimaku Osaka-shi, Osaka, 534-0027, JP)
Ooe, Yoshinao (35-10, Kawashimakitauracho Nishikyouku Kyoto-shi, Kyoto, 615-8107, JP)
Kono, Hiroki (2-6-3-517, Kasuga Suita-shi, Osaka, 565-0853, JP)
Tanaka, Hiroyosi (288-3, Kiyomizu 1-chome Higashiyama-ku Kyoto-shi, Kyoto, 605-0862, JP)
Kotera, Koichi (14-3-1101, Nakanocho 5-chome Miyakojimaku Osaka-shi, Osaka, 534-0027, JP)
Ooe, Yoshinao (35-10, Kawashimakitauracho Nishikyouku Kyoto-shi, Kyoto, 615-8107, JP)
Kono, Hiroki (2-6-3-517, Kasuga Suita-shi, Osaka, 565-0853, JP)
Tanaka, Hiroyosi (288-3, Kiyomizu 1-chome Higashiyama-ku Kyoto-shi, Kyoto, 605-0862, JP)
International Classes:
H01J1/316; H01J17/04; (IPC1-7): H01J1/30; H01J11/02; H01J9/02
Attorney, Agent or Firm:
Nakajima, Shiro (6F Yodogawa 5-Bankan, 2-1 Toyosaki 3-chom, Kita-ku Osaka-shi Osaka, 531-0072, JP)
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