ELECTRON EMITTER AND FIELD EMISSION DEVICE PROVIDED WITH ELECTRON EMITTER

Title:

ELECTRON EMITTER AND FIELD EMISSION DEVICE PROVIDED WITH ELECTRON EMITTER

Document Type and Number:

WIPO Patent Application WO/2010/013772

Kind Code:

A1

Abstract:

Provided is an emitter, which has a carbon film structure and emits field-emitted electrons. In the emitter, local field concentration is suppressed and current deterioration and discharge phenomenon due to thermal deterioration are prevented from being generated. Dispersion of electron emission is also suppressed. Furthermore, a field emission device, which has the emitter applied thereto has desired functions and is more suitable for practical use, is also provided. The electron emitter is provided with a guard electrode (13) on an outer circumferential side of a carbon film structure (10) formed on a substrate (7) by a plasma CVD method. The guard electrode (13) has a curved surface section (curved surface section curved to the opposite side to a film forming direction) (13a) in the film-forming direction of the carbon film structure (10), and has, on the outer circumference side of the guard electrode (13), a curvature radius (R2) equivalent to the curvature radius (R1) on the carbon film structure side or more on the curved surface section (13a).

Inventors:

HABA MASANORI
ISHIGURO YOSHIHISA
SUZUKI RYOUICHI

Application Number:

PCT/JP2009/063563

Publication Date:

February 04, 2010

Filing Date:

July 30, 2009

Export Citation:

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Assignee:

LIFE TECHNOLOGY RESERCH INST I
HABA MASANORI
NAT INST OF ADVANCED IND SCIEN (JP)
ISHIGURO YOSHIHISA
SUZUKI RYOUICHI

International Classes:

H01J1/304; H01J29/62; H01J35/06; H01J63/06

Foreign References:

JP2002093307A	2002-03-29
JP2000100317A	2000-04-07
JP2002100282A	2002-04-05
JP2000133117A	2000-05-12
JP2008150253A	2008-07-03
JP2008150253A	2008-07-03
JP2008150682A	2008-07-03

Other References: