Title:
ELECTRON EMITTING DEVICE AND MANUFACTURING METHOD THEREOF AND IMAGE PICK UP DEVICE OR DISPLAY DEVICE USING ELECTRON EMITTING DEVICE
Document Type and Number:
WIPO Patent Application WO/2005/096335
Kind Code:
A1
Abstract:
An electron emitting device is composed of a plurality of electron emitting elements. The electron emitting element is provided with a lower electrode (11) and an upper electrode (15) and emits an electron from an upper electrode side. In the electron emitting device, a space is formed between the electron emitting elements and the upper electrode extends over the space on a bridge part (15a). The space is formed by providing a through hole or a notched part (15a) on the bridge part, and etching a stacked body under the upper electrode by using the bridge part as a mask. The upper electrodes of the adjacent electron emitting elements are electrically connected by the bridge part without bringing the upper electrodes into contact with the electron emitting element side planes and a substrate. Therefore, a current path can be shortened and a possibility of disconnection can be reduced.
Inventors:
Sakemura, Kazuto c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Hanihara, Koji c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Negishi, Nobuyasu c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Nakada, Tomonari c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Hanihara, Koji c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Negishi, Nobuyasu c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Nakada, Tomonari c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Application Number:
PCT/JP2005/005643
Publication Date:
October 13, 2005
Filing Date:
March 22, 2005
Export Citation:
Assignee:
PIONEER CORPORATION (4-1 Meguro 1-chome, Meguro-ku Tokyo, 54, 15386, JP)
PIONEER MICRO TECHNOLOGY CORPORATION (No.465 Osato-cho, Kofu-shi Yamanashi, 53, 40000, JP)
Sakemura, Kazuto c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Hanihara, Koji c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Negishi, Nobuyasu c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Nakada, Tomonari c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
PIONEER MICRO TECHNOLOGY CORPORATION (No.465 Osato-cho, Kofu-shi Yamanashi, 53, 40000, JP)
Sakemura, Kazuto c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Aso, Saburo c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Hanihara, Koji c/o Pioneer Micro Technology Corporation (No.465 Osato-cho Kofu-sh, Yamanashi 53, 40000, JP)
Negishi, Nobuyasu c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Nakada, Tomonari c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
Yoshikawa, Takamasa c/o Corporate Research and Development Laboratories (Pioneer Corporation 6-1-1, Fujimi, Tsurugashima-sh, Saitama 88, 35022, JP)
International Classes:
H01J1/312; H01J9/02; H01J31/12; (IPC1-7): H01J1/312; H01J9/02; H01J31/12
Attorney, Agent or Firm:
Fujimura, Motohiko (FUJIMURA PATENT BUREAU Togeki Bldg, 1-1 Tsukiji 4-chome, Chuo-ku Tokyo, 104-0045, JP)
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