ELECTRON EMITTING DEVICE AND MANUFACTURING METHOD THEREOF AND IMAGE PICK UP DEVICE OR DISPLAY DEVICE USING ELECTRON EMITTING DEVICE

Title:

ELECTRON EMITTING DEVICE AND MANUFACTURING METHOD THEREOF AND IMAGE PICK UP DEVICE OR DISPLAY DEVICE USING ELECTRON EMITTING DEVICE

Document Type and Number:

WIPO Patent Application WO/2005/096335

Kind Code:

A1

Abstract:

An electron emitting device is composed of a plurality of electron emitting elements. The electron emitting element is provided with a lower electrode (11) and an upper electrode (15) and emits an electron from an upper electrode side. In the electron emitting device, a space is formed between the electron emitting elements and the upper electrode extends over the space on a bridge part (15a). The space is formed by providing a through hole or a notched part (15a) on the bridge part, and etching a stacked body under the upper electrode by using the bridge part as a mask. The upper electrodes of the adjacent electron emitting elements are electrically connected by the bridge part without bringing the upper electrodes into contact with the electron emitting element side planes and a substrate. Therefore, a current path can be shortened and a possibility of disconnection can be reduced.

Inventors:

SAKEMURA KAZUTO (JP)
ASO SABURO (JP)
HANIHARA KOJI (JP)
NEGISHI NOBUYASU (JP)
NAKADA TOMONARI (JP)
YOSHIKAWA TAKAMASA (JP)

Application Number:

PCT/JP2005/005643

Publication Date:

October 13, 2005

Filing Date:

March 22, 2005

Export Citation:

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Assignee:

PIONEER CORP (JP)
PIONEER MICRO TECHNOLOGY CORP (JP)
SAKEMURA KAZUTO (JP)
ASO SABURO (JP)
HANIHARA KOJI (JP)
NEGISHI NOBUYASU (JP)
NAKADA TOMONARI (JP)
YOSHIKAWA TAKAMASA (JP)

International Classes:

H01J1/312; H01J9/02; H01J31/12; (IPC1-7): H01J1/312; H01J9/02; H01J31/12

Domestic Patent References:

WO2003049132A1	2003-06-12
WO2002005305A1	2002-01-17

Foreign References:

JP2004503061A	2004-01-29
JP2000188058A	2000-07-04

Other References: