Title:
ELECTRON-EMITTING ELEMENT AND IMAGE PICKUP DEVICE PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2011/083512
Kind Code:
A1
Abstract:
Disclosed is a surface emission type electron-emitting element (1), wherein even when a focusing electrode layer (8) is provided therein, a gate electrode layer (6) and the focusing electrode layer are not electrically connected by a carbon layer (11). Also disclosed is an image pickup device which is provided with the electron-emitting element.
Specifically disclosed is an electron-emitting element which is provided with: an electron-emitting layer (3) for emitting electrons from a surface emission part (9); a gate electrode layer which is formed on the surface of the electron-emitting layer with a first insulating layer (5) interposed therebetween; a focusing electrode layer which is formed on the surface of the gate electrode layer with a second insulating layer (7) interposed therebetween, and focuses emitted electrons; an emission recess (10) which penetrates the focusing electrode layer, the second insulating layer, the gate electrode layer and the first insulating layer, and forms a recess-shaped opening to the surface of the surface emission part; and a carbon layer which is formed from the surface of the focusing electrode layer to the inner surface of the emission recess. The carbon layer has an annular discontinuous part (11a) at a film formation part of the emission recess to which a layer end of the second insulating layer faces.
Inventors:
YOSHINARI, Masaki (465 Osato-cho Kofu-sh, Yamanashi 53, 〒4000053, JP)
吉成正樹 (〒53 山梨県甲府市大里町４６５番地パイオニア・マイクロ・テクノロジー株式会社内 Yamanashi, 〒4000053, JP)
AKIYAMA, Shutetsu (465 Osato-cho Kofu-sh, Yamanashi 53, 〒4000053, JP)
吉成正樹 (〒53 山梨県甲府市大里町４６５番地パイオニア・マイクロ・テクノロジー株式会社内 Yamanashi, 〒4000053, JP)
AKIYAMA, Shutetsu (465 Osato-cho Kofu-sh, Yamanashi 53, 〒4000053, JP)
Application Number:
JP2010/000069
Publication Date:
July 14, 2011
Filing Date:
January 07, 2010
Export Citation:
Assignee:
PIONEER CORPORATION (1-1 Shin-ogura, Saiwai-ku Kawasaki-sh, Kanagawa 31, 〒2120031, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
PIONEER MICRO TECHNOLOGY CORPORATION (465 Osato-cho, Kofu-shi Yamanashi, 53, 〒4000053, JP)
パイオニア・マイクロ・テクノロジー株式会社 (〒53 山梨県甲府市大里町４６５番地 Yamanashi, 〒4000053, JP)
YOSHINARI, Masaki (465 Osato-cho Kofu-sh, Yamanashi 53, 〒4000053, JP)
パイオニア株式会社 (〒31 神奈川県川崎市幸区新小倉１番１号 Kanagawa, 〒2120031, JP)
PIONEER MICRO TECHNOLOGY CORPORATION (465 Osato-cho, Kofu-shi Yamanashi, 53, 〒4000053, JP)
パイオニア・マイクロ・テクノロジー株式会社 (〒53 山梨県甲府市大里町４６５番地 Yamanashi, 〒4000053, JP)
YOSHINARI, Masaki (465 Osato-cho Kofu-sh, Yamanashi 53, 〒4000053, JP)
International Classes:
H01J1/312; H01J29/04; H01J31/28
Attorney, Agent or Firm:
OCHIAI, Minoru (2th Floor, taiyo Building 12-4, Iwamotocho 1-chome, Chiyoda-k, Tokyo 32, 〒1010032, JP)
Claims: