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Patent Searching and Data


Title:
ELECTRON GUN AND ELECTRON BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/114521
Kind Code:
A1
Abstract:
A cathode electron gun (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the cathode electron gun, has electrical conductivity that holds the cathode electron gun, and is composed of a material that does not easily react with the cathode electron gun when in a heated state, is provided. The tip of the cathode electron gun (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.

Inventors:
YASUDA Hiroshi (INDUSTRY SUPPORT SQUARE TAMA302 3-6-1, Azuma-cho, Akishima-sh, Tokyo 33, 〒1960033, JP)
Application Number:
JP2011/054377
Publication Date:
August 30, 2012
Filing Date:
February 25, 2011
Export Citation:
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Assignee:
PARAM CORPORATION (INDUSTRY SUPPORT SQUARE TAMA302, 3-6-1 Azuma-cho, Akishima-sh, Tokyo 33, 〒1960033, JP)
株式会社PARAM (〒33 東京都昭島市東町3-6-1 産業サポートスクエア・TAMA302 Tokyo, 〒1960033, JP)
International Classes:
H01J1/13; H01J1/26; H01J1/304; H01J37/06; H01L21/027
Foreign References:
JPH0298921A
JPS57196445A
JPH03274632A
JPH0850873A
JPS6332846A
JPH06181029A
US6828996B2
JPH08212952A
JPH06181029A
Other References:
See also references of EP 2680294A4
"Edectronllon beam handbook", 28 October 1998, JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE
Attorney, Agent or Firm:
YKI Patent Attorneys (1-34-12, Kichijoji-Honcho Musashino-sh, Tokyo 04, 〒1800004, JP)
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Claims: