Title:
ELECTRON GUN AND ELECTRON BEAM EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2000/048224
Kind Code:
A1
Abstract:
An electron gun comprises a main cathode (77) in the form of a plate with an electron emission surface (79), and an auxiliary cathode (81) arranged on the back of the main cathode to heat the main cathode (77) by electron bombardment. The auxiliary cathode (81) consists of double-helical filaments (83, 85), and it is larger in diameter than the main cathode (77). As a result, the temperature of the electron emission surface (79) is higher in its periphery than in its center so that an electron beam of uniform intensity distribution can be produced.
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| JPS5152274 | DENKAIHOSHASOCHITO SONOSEIZOHO |
Inventors:
NAKASUJI MAMORU (JP)
OKAMOTO KAZUYA (JP)
OKAMOTO KAZUYA (JP)
Application Number:
PCT/JP2000/000669
Publication Date:
August 17, 2000
Filing Date:
February 08, 2000
Export Citation:
Assignee:
NIPPON KOGAKU KK (JP)
NAKASUJI MAMORU (JP)
OKAMOTO KAZUYA (JP)
NAKASUJI MAMORU (JP)
OKAMOTO KAZUYA (JP)
International Classes:
H01J3/02; H01J37/075; H01L21/027; (IPC1-7): H01J37/075; H01J37/06; H01J1/22; H01J37/305; H01L21/027; G03F7/20
Foreign References:
| JPH0732847U | 1995-06-16 | |||
| JPS59105759U | 1984-07-16 | |||
| JPH05174702A | 1993-07-13 | |||
| JPH0451438A | 1992-02-19 | |||
| JPH10223164A | 1998-08-21 |
Attorney, Agent or Firm:
Nagai, Fuyuki (Kasumigaseki Chiyoda-ku Tokyo, JP)
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