Title:
ELECTRON GUN AND VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/034086
Kind Code:
A1
Abstract:
Disclosed is an electron gun which is provided with a repeller electrode (24) in which a positive voltage is applied to an anode electrode (23) closer to the side of an emission hole (13) than the anode electrode (23), wherein the repeller electrode (24) pushes back positive ions which travel in the direction of a cathode electrode (21) along a central axis line (28) caused by the collision of electron beams with residual gas to the side of a vacuum chamber (18).
The repeller electrode (24) having a cylindrical shape is not something to curve the trajectories of electron beams. In addition, a plurality of pores are formed in the repeller electrode (24), so that the gas in the repeller electrode (24) is evacuated passing through the pores.
This prevents the positive ions from being incident upon the cathode electrode (21), making it possible to provide the electron gun having a long-life.
Inventors:
WATANABE, Masaya (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
渡辺 将也 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
渡辺 将也 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
Application Number:
JP2010/065931
Publication Date:
March 24, 2011
Filing Date:
September 15, 2010
Export Citation:
Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
WATANABE, Masaya (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
WATANABE, Masaya (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
International Classes:
H01J37/063; C23C14/30; H01J29/48; H01J37/065
Attorney, Agent or Firm:
ISHIJIMA, Shigeo et al. (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)
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