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Title:
ELECTRON GUN
Document Type and Number:
WIPO Patent Application WO/2004/073010
Kind Code:
A1
Abstract:
An electron source suitable for an electron beam exposure system, an Auger electronic spectrometer or the like, and provides a small total emission current amount even during a high-angular-current-density operation. An electron gun provided with a cathode (1) consisting of tungsten or molybdenum single crystal and provided on the surface thereof with a coating layer consisting of oxygen and at least one kind of metal element selected from a group consisting of 2A group, 3A group and 4A group, characterized in that the end of the cathode (1) has a conical trapezoid shape, a total conical angle of a conical trapezoid portion (8) is between 25° and 95°, and the diameter of the top face (9) is 5μm through 200μm.

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Inventors:
Terui, Yoshinori c/o Denki Kagaku Kogyo Kabushiki Kaisha (1135 Shibukawa Kojo, Nakamur, Shibukawa-shi Gunma 20, 37785, JP)
Nonogaki, Ryozo c/o Denki Kagaku Kogyo Kabushiki Kaisha (1135 Shibukawa Kojo, Nakamur, Shibukawa-shi Gunma 20, 37785, JP)
Sakawa, Seiichi c/o Denki Kagaku Kogyo Kabushiki Kaisha (1135 Shibukawa Kojo, Nakamur, Shibukawa-shi Gunma 20, 37785, JP)
Application Number:
PCT/JP2004/001686
Publication Date:
August 26, 2004
Filing Date:
February 17, 2004
Export Citation:
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Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA (4-1 Yurakucho 1-chome, Chiyoda-ku, Tokyo 55, 10084, JP)
Terui, Yoshinori c/o Denki Kagaku Kogyo Kabushiki Kaisha (1135 Shibukawa Kojo, Nakamur, Shibukawa-shi Gunma 20, 37785, JP)
Nonogaki, Ryozo c/o Denki Kagaku Kogyo Kabushiki Kaisha (1135 Shibukawa Kojo, Nakamur, Shibukawa-shi Gunma 20, 37785, JP)
Sakawa, Seiichi c/o Denki Kagaku Kogyo Kabushiki Kaisha (1135 Shibukawa Kojo, Nakamur, Shibukawa-shi Gunma 20, 37785, JP)
International Classes:
H01J1/146; H01J1/16; H01J9/04; H01J37/073; (IPC1-7): H01J37/073; H01J9/04; H01J1/16
Attorney, Agent or Firm:
Senmyo, Kenji (Torimoto Kogyo Bldg, 38 Kanda-Higashimatsushitach, Chiyoda-ku Tokyo 42, 10100, JP)
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