Title:
ELECTRON GUN
Document Type and Number:
WIPO Patent Application WO/2019/181820
Kind Code:
A1
Abstract:
This invention relates to an electron gun that uses an electron gun cathode material (105) primarily based on LaB6 or CeB6. Methane gas or ethane gas is caused to flow into the vacuum chamber where the electron gun cathode material (105)is held such that the vacuum partial pressure is less than or equal to 1×10-4 pascals, and is heated in the temperature range from 1000°C to 1500°C. A boron lattice is destroyed, exposing a lanthanum solution or a cerium solution, which adheres to the surface of the LaB6 or CeB6, and thermoelectrons are emitted from the lanthanum solution surface or cerium solution surface.
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| JPH05174702 | HEATER FOR LONG CATHODE |
| WO/2019/180242 | CATHODE ASSEMBLY FOR ELECTRON GUN |
Inventors:
YASUDA HIROSHI (JP)
OOAE YOSHIHISA (JP)
SHIBAOKA TATSUYA (JP)
MURATA HIDEKAZU (JP)
OOAE YOSHIHISA (JP)
SHIBAOKA TATSUYA (JP)
MURATA HIDEKAZU (JP)
Application Number:
PCT/JP2019/011053
Publication Date:
September 26, 2019
Filing Date:
March 18, 2019
Export Citation:
Assignee:
PARAM CORP (JP)
International Classes:
H01J37/075; H01J1/148; H01J37/06; H01J37/065; H01L21/027
Domestic Patent References:
| WO2012114521A1 | 2012-08-30 |
Foreign References:
| JP2017063048A | 2017-03-30 | |||
| JPH05136097A | 1993-06-01 |
Attorney, Agent or Firm:
YKI INTELLECTUAL PROPERTY ATTORNEYS (JP)
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