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Patent Searching and Data


Title:
ELECTRON MICROSCOPE, AND METHOD FOR OBSERVING MEASUREMENT SAMPLE
Document Type and Number:
WIPO Patent Application WO/2019/163715
Kind Code:
A1
Abstract:
Provided are an electron microscope, and a method for observing a measurement sample, with which observation can be performed nondestructively. An electron microscope (1) is provided with a laser light source (2) which generates a CW laser (7), an irradiation lens system (condensing lens (4) and objective lens (6)) which irradiates a measurement sample (30) with the CW laser (7), an energy analyzer (22) which separates, by energy, photo-electrons discharged from the measurement sample (30) by means of the CW laser (7), an energy slit (23) which allows photo-electrons having a prescribed energy to pass, an electron beam detector (25) which detects the photo-electrons that have passed through the energy slit (23), a first electron lens system (21) which causes the photo-electrons discharged from the measurement sample (30) to converge in the energy analyzer (22), and a second electron lens system (24) which projects the photo-electrons that have passed through the energy slit (23) onto the electron beam detector (25).

Inventors:
SHIN SHIK (JP)
TANIUCHI TOSHIYUKI (JP)
Application Number:
PCT/JP2019/005874
Publication Date:
August 29, 2019
Filing Date:
February 18, 2019
Export Citation:
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Assignee:
UNIV TOKYO (JP)
International Classes:
G02B21/00; G01N23/227; H01J37/20
Foreign References:
JP2011247870A2011-12-08
JP2005512339A2005-04-28
JPH02144844A1990-06-04
JPH11214461A1999-08-06
JPH07325052A1995-12-12
JP2011096714A2011-05-12
Other References:
TANIUCHI TOSHIYUKI; KOTANI YOSHINORI; SHIN SHIK: "Ultrahigh-spatial-resolution chemical and magnetic imaging by laser -based photoemission electron microscopy", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 86, no. 2, 023701, 2 February 2015 (2015-02-02), pages 1 - 5, XP012194194, ISSN: 0034-6748, DOI: 10.1063/1.4906755
PRATEEK GOEL; MARCEL NOOIJEN: "A proposed new scheme for vibronically resolved time-dependent photoelectron spectroscopy: pump-repump-continuous wave-photoelectron spectroscopy (prp-cw-pes)", PHYSICAL CHEMISTRY CHEMICAL PHYSICS, vol. 18, 1 January 2016 (2016-01-01), pages 11263 - 11277, XP055633197, ISSN: 1463-9076, DOI: 10.1039/C5CP07889J
TAKAYUKI KISS, TADASHI TOGASHI, SHIK SHIN, SHUNTAROU WATABE: "laser excited ultrahigh resolution photoemission spectroscopy", HYOMEN KAGAKU, vol. 26, no. 12, 1 January 2005 (2005-01-01), pages 716 - 720, XP055733840, ISSN: 0388-5321, DOI: 10.1380/jsssj.26.716
Attorney, Agent or Firm:
DORAIT IP LAW FIRM (JP)
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