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Title:
ELECTRON MICROSCOPE, AND METHOD FOR OBSERVING MEASUREMENT SAMPLE
Document Type and Number:
WIPO Patent Application WO/2019/163715
Kind Code:
A1
Abstract:
Provided are an electron microscope, and a method for observing a measurement sample, with which observation can be performed nondestructively. An electron microscope (1) is provided with a laser light source (2) which generates a CW laser (7), an irradiation lens system (condensing lens (4) and objective lens (6)) which irradiates a measurement sample (30) with the CW laser (7), an energy analyzer (22) which separates, by energy, photo-electrons discharged from the measurement sample (30) by means of the CW laser (7), an energy slit (23) which allows photo-electrons having a prescribed energy to pass, an electron beam detector (25) which detects the photo-electrons that have passed through the energy slit (23), a first electron lens system (21) which causes the photo-electrons discharged from the measurement sample (30) to converge in the energy analyzer (22), and a second electron lens system (24) which projects the photo-electrons that have passed through the energy slit (23) onto the electron beam detector (25).

Inventors:
SHIN Shik (3-1 Hongo 7-chome, Bunkyo-k, Tokyo 54, 〒1138654, JP)
TANIUCHI Toshiyuki (3-1 Hongo 7-chome, Bunkyo-k, Tokyo 54, 〒1138654, JP)
Application Number:
JP2019/005874
Publication Date:
August 29, 2019
Filing Date:
February 18, 2019
Export Citation:
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Assignee:
THE UNIVERSITY OF TOKYO (3-1 Hongo 7-chome, Bunkyo-ku Tokyo, 54, 〒1138654, JP)
International Classes:
G01N23/227; G02B21/00; H01J37/20
Foreign References:
JP2011247870A2011-12-08
JP2005512339A2005-04-28
JPH02144844A1990-06-04
JPH11214461A1999-08-06
JPH07325052A1995-12-12
Other References:
TANIUCHI ET AL.: "Ultrahigh-spatial-resolution chemical and magnetic imaging by laser -based photoemission electron microscopy", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 86, 2015, pages 023701
GOEL ET AL.: "A Proposed new scheme for vibronically resolved time-dependent photoelectron spectroscopy: pump-repump-continuous wave-photoelectron spectroscopy (prp-cw-pes", PHYSICAL CHEMISTRY CHEMICAL PHYSICS, vol. 18, 2016, pages 11263 - 11277, XP055633197
KISS ET AL: "laser excited ultrahigh resolution photoemission spectroscopy", HYOMEN KAGAKU, vol. 26, no. 12, 2005, pages 716 - 720
Attorney, Agent or Firm:
DORAIT IP LAW FIRM (411 La Tour Shinjuku, 15-1 Nishishinjuku 6-chome, Shinjuku-k, Tokyo 23, 〒1600023, JP)
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