Title:
ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2010/084860
Kind Code:
A1
Abstract:
An electron microscope provided with a reflected electron detector comprising a reflected electron detector element (9), a low-vacuum secondary electron detector having bias electrodes (11) and a stage (12), and a signal switcher (14) for switching between the detection signals of the detectors. An observation condition memory (20) stores the optimal observation conditions for each detector. In response to detector switching, a CPU (19) calls up the observation conditions stored in the observation condition memory (20) and sets the state of the electron microscope so as to match the called up observation conditions. An image processing device (22) converts the plurality of detection signals obtained in accordance with detector switching into respective two dimensional image signals and evaluates the image quality of the two dimensional image signals. In an image quality priority mode, the CPU (19) switches to the detector with the higher evaluation value and displays the image, based on the evaluation results of the image processing device (22). This configuration for an electron microscope with a plurality of detectors facilitates the selection of detectors and setting of optimal observation conditions for each detector.
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Inventors:
HOSHINO Yoshinobu (Hitachi High-Technologies Corporation 882, Ohaza-Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
星野 吉延 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
星野 吉延 (〒04 茨城県ひたちなか市大字市毛８８２番地 株式会社日立ハイテクノロジーズ 那珂事業所内 Ibaraki, 〒3128504, JP)
Application Number:
JP2010/050569
Publication Date:
July 29, 2010
Filing Date:
January 19, 2010
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
HOSHINO Yoshinobu (Hitachi High-Technologies Corporation 882, Ohaza-Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
HOSHINO Yoshinobu (Hitachi High-Technologies Corporation 882, Ohaza-Ichige, Hitachinaka-sh, Ibaraki 04, 〒3128504, JP)
International Classes:
H01J37/22; H01J37/244; H01J37/28
Attorney, Agent or Firm:
KASUGA Yuzuru (Torii-nihonbashi Bldg, 4-1 Nihonbashi-honcho 3-chom, Chuo-ku Tokyo 23, 〒1030023, JP)
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