Title:
ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2011/122171
Kind Code:
A1
Abstract:
Disclosed is an electron microscope that is a transmission type electron microscope that uses a polarized electron beam, and wherein a high contrast image can be obtained by recording the intensity distribution of an electron beam that was transmitted through a sample. The electron microscope is provided with a laser beam generating apparatus (2); a polarization apparatus (11) that polarizes a laser beam into a circularly polarized laser beam, and is capable of reversing the direction of the circular polarization over time; a semiconductor photocathode (16) provided with a strained superlattice semiconductor layer that generates a polarized electron beam when irradiated with a circularly polarized laser beam; a transmission type electron microscope (24) that utilizes the polarized electron beam; an electron-beam intensity-distribution recording apparatus (34) that is arranged at a face where a polarized electron beam that was transmitted through a sample reaches; and a reversal instruction apparatus (40) that sends an instruction to the polarization apparatus to reverse the direction of the circular polarization, and also sends an instruction to the electron-beam intensity-distribution recording apparatus in synchronization therewith. The electron-beam intensity-distribution recording apparatus records the intensity distribution of the polarized electron beam before and after the reversal thereof, and a difference acquisition apparatus (36) acquires the difference therebetween.
Inventors:
TANAKA NOBUO (JP)
NAKANISHI TSUTOMU (JP)
TAKEDA YOSHIKAZU (JP)
ASANO HIDEFUMI (JP)
SAITOH KOH (JP)
UJIHARA TORU (JP)
KUWAHARA MAKOTO (JP)
NAKANISHI TSUTOMU (JP)
TAKEDA YOSHIKAZU (JP)
ASANO HIDEFUMI (JP)
SAITOH KOH (JP)
UJIHARA TORU (JP)
KUWAHARA MAKOTO (JP)
Application Number:
PCT/JP2011/053790
Publication Date:
October 06, 2011
Filing Date:
February 22, 2011
Export Citation:
Assignee:
UNIV NAGOYA NAT UNIV CORP (JP)
TANAKA NOBUO (JP)
NAKANISHI TSUTOMU (JP)
TAKEDA YOSHIKAZU (JP)
ASANO HIDEFUMI (JP)
SAITOH KOH (JP)
UJIHARA TORU (JP)
KUWAHARA MAKOTO (JP)
TANAKA NOBUO (JP)
NAKANISHI TSUTOMU (JP)
TAKEDA YOSHIKAZU (JP)
ASANO HIDEFUMI (JP)
SAITOH KOH (JP)
UJIHARA TORU (JP)
KUWAHARA MAKOTO (JP)
International Classes:
H01J37/26; H01J1/34; H01J37/073
Foreign References:
| JP2008218063A | 2008-09-18 | |||
| JP2010003450A | 2010-01-07 | |||
| JPH08240697A | 1996-09-17 | |||
| JP2001006601A | 2001-01-12 | |||
| JP2010074008A | 2010-04-02 | |||
| JP2008218063A | 2008-09-18 | |||
| JP2007258119A | 2007-10-04 |
Other References:
TSUTOMU NAKANISHI: "Application of spin polarized electrons for electron microscopes", KENBIKYO, vol. 44, no. 2, 2009, pages 103 - 110, XP008158976
HITOSHI SATO ET AL.: "Inverse Photoemission Spectroscopy", JOURNAL OF THE SURFACE SCIENCE SOCIETY OF JAPAN, vol. 29, no. 2, 2008, pages 114 - 119
TSUTOMU NAKANISHI: "High Spin Polarization and High Brightness Electron Source", JOURNAL OF THE SURFACE SCIENCE SOCIETY OF JAPAN, vol. 29, no. 11, 2008, pages 672 - 681
TSUTOMU NAKANISHI: "Spin Henkyoku Denshi Beam-gen no Kaihatsu", GENSHIKAKU KENKYU, vol. 46, no. 1, 2001, pages 5 - 23, XP008159354
See also references of EP 2555222A4
HITOSHI SATO ET AL.: "Inverse Photoemission Spectroscopy", JOURNAL OF THE SURFACE SCIENCE SOCIETY OF JAPAN, vol. 29, no. 2, 2008, pages 114 - 119
TSUTOMU NAKANISHI: "High Spin Polarization and High Brightness Electron Source", JOURNAL OF THE SURFACE SCIENCE SOCIETY OF JAPAN, vol. 29, no. 11, 2008, pages 672 - 681
TSUTOMU NAKANISHI: "Spin Henkyoku Denshi Beam-gen no Kaihatsu", GENSHIKAKU KENKYU, vol. 46, no. 1, 2001, pages 5 - 23, XP008159354
See also references of EP 2555222A4
Attorney, Agent or Firm:
KAI-U PATENT LAW FIRM (JP)
Patent business corporation KAI-U Patent Law Firm (JP)
Patent business corporation KAI-U Patent Law Firm (JP)
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Claims: