Title:
ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2015/045443
Kind Code:
A1
Abstract:
Provided is an electron microscope wherein a detector requiring the application of a voltage is used to obtain a micrograph from a sample placed in a gas atmosphere.
The electron microscope is provided with a gas inlet device for emitting gas onto a sample, and a gas control device controlling the amount of gas emitted by the gas inlet device so that, during the gas emission by the gas inlet device, the degree of vacuum within the space where the detector (49-51, 55) is installed is continuously maintained to less than a set value.
Inventors:
OYAGI TOSHIYUKI (JP)
YOTSUJI TAKAFUMI (JP)
YOTSUJI TAKAFUMI (JP)
Application Number:
PCT/JP2014/056823
Publication Date:
April 02, 2015
Filing Date:
March 14, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/28; H01J37/22; H01J37/244; H01J37/26
Foreign References:
| JPH05325859A | 1993-12-10 | |||
| JP2002100316A | 2002-04-05 | |||
| JP2008047310A | 2008-02-28 | |||
| JP2011154921A | 2011-08-11 | |||
| JP2005190864A | 2005-07-14 | |||
| JP2011003426A | 2011-01-06 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
Download PDF:
Previous Patent: OIL PUMP DEVICE AND RELIEF VALVE
Next Patent: RADIO BASE STATION APPARATUS AND RESOURCE ALLOCATION METHOD
Next Patent: RADIO BASE STATION APPARATUS AND RESOURCE ALLOCATION METHOD