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Title:
ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2019/193624
Kind Code:
A1
Abstract:
An electron gun (1) projects an electron beam, and a camera with a scintillator detects a signal generated from a sample due to the irradiation of the electron beam and acquires a transmission image. A current reading terminal measures a current value of a signal to the scintillator, an electron beam density calculation unit (483) calculates an electron beam density on the basis of the measured current value and the area of the scintillator, and an output control unit (485) performs output control using information that relates to the calculated electron beam density. In this manner, an electron microscope measures the current value of the signal to the scintillator of the camera and calculates the electron beam density on the basis of the current value and the area of the scintillator, therefore it is possible to calculate information that can identify the influence of the electron beams on the sample.

Inventors:
NAGAOKI, Isao (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
TAMURA, Keiji (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
NODERA, Yasuyuki (24-14 Nishi-Shimbashi 1-chome, Minato-k, Tokyo 17, 〒1058717, JP)
Application Number:
JP2018/014102
Publication Date:
October 10, 2019
Filing Date:
April 02, 2018
Export Citation:
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Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi-Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
International Classes:
H01J37/244; G01T1/20
Domestic Patent References:
WO2015016040A12015-02-05
Foreign References:
JP2007128807A2007-05-24
JPH0353440A1991-03-07
JP2016009622A2016-01-18
JPH1116967A1999-01-22
JPS5331955A1978-03-25
US7091486B12006-08-15
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (3F Shinjuku Gyoen Bldg, 3-10 Shinjuku 2-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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