ELECTRON SOURCE MANUFACTURING METHOD - DENKI KAGAKU KOGYO KABUSHIKI KAISHA

Title:

ELECTRON SOURCE MANUFACTURING METHOD

Document Type and Number:

WIPO Patent Application WO/2006/075715

Kind Code:

A1

Abstract:

An electron source having excellent uniformity in current irradiation distribution is surely provided at a low cost. A method for manufacturing the electron source having an electron emitting section at one end of a rod is characterized in that it includes a step of forming the electron emitting section by machining, and a step of removing a damaged layer (19) on the surface of the formed electron emitting section by chemical polishing or electrolytic polishing.

Inventors:

Sakawa, Seiichi c/o Denki Kagaku Kogyo Kabushiki Kaisha Shibukawa (Kojo 1135, Nakamura, Shibukawa-sh, Gunma 20, 37785, JP)
Terui, Yoshinori c/o Denki Kagaku Kogyo Kabushiki Kaisha Shibukawa (Kojo 1135, Nakamura, Shibukawa-sh, Gunma 20, 37785, JP)

Application Number:

PCT/JP2006/300394

Publication Date:

July 20, 2006

Filing Date:

January 13, 2006

Export Citation:

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Assignee:

DENKI KAGAKU KOGYO KABUSHIKI KAISHA (1-1 Nihonbashi-Muromachi 2-chome, Chuo-ku Tokyo, 38, 10383, JP)
Sakawa, Seiichi c/o Denki Kagaku Kogyo Kabushiki Kaisha Shibukawa (Kojo 1135, Nakamura, Shibukawa-sh, Gunma 20, 37785, JP)
Terui, Yoshinori c/o Denki Kagaku Kogyo Kabushiki Kaisha Shibukawa (Kojo 1135, Nakamura, Shibukawa-sh, Gunma 20, 37785, JP)

International Classes:

H01J1/304; H01J1/30; H01J9/20; H01J37/073

Attorney, Agent or Firm:

Senmyo, Kenji (Torimoto Kogyo Bldg, 38 Kanda-Higashimatsushitach, Chiyoda-ku Tokyo, 101-0042, JP)

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